Corrigendum deletes the sub-193 nm light-source criterion from Annex I entry 3B501.f.1.a

What changed

• The corrigendum of 9 February 2026 to Delegated Regulation (EU) 2025/2003 replaces the text of entry 3B501.f.1.a, 'A light source wavelength shorter than 193 nm; or', with 'Not used;' [OJ L 2026/90092, entry 3B501.f.1.a].
• 'Not used' is the Annex I placeholder for a deleted provision: the sub-193 nm light-source criterion no longer exists as a route into entry 3B501.f.1, whose remaining sub-points are unchanged [OJ L 2026/90092, entry 3B501.f.1.a].

Who is affected

Exporters and holders of prior classifications of align-and-expose step-and-repeat or step-and-scan wafer-processing equipment assessed under entry 3B501.f.1 [CELEX 02021R0821-20251115, entry 3B501.f.1].

Licence posture

not stated in source

Instruments

Annex I, Regulation (EU) 2021/821 — entry 3B501.f.1.a

Relevance for EU exporters

Directly applicable: Annex I of Regulation (EU) 2021/821 governs EU exporters' classification obligations, and the corrected criterion gates entry 3B501.f.1 [OJ L 2026/90092, entry 3B501.f.1.a].

Annex I entries affected

3B501

Text change

Materiality (system assessment, source-cited)

Editorial de-duplication, assessed as non-substantive: the deleted criterion of entry 3B501.f.1.a is verbatim-identical to entry 3B001.f.1.a, which the corrigendum did not touch [CELEX 02021R0821-20251115, entry 3B001.f.1.a]. Equipment meeting the sub-193 nm light-source parameter remains controlled under entry 3B001.f.1 — no change to what requires authorisation [CELEX 02021R0821-20251115, entry 3B001.f.1].

Reclassification impact

Holders of prior classifications relying on entry 3B501.f.1.a should revalidate against the corrected entry text: the sub-193 nm light-source criterion no longer exists, and equipment caught solely by it falls outside 3B501.f.1.a.

Action items

• Revalidate any classification that relied on the deleted sub-193 nm light-source criterion of entry 3B501.f.1.a — including lithography equipment previously caught by it.
• Record the Annex I version relied upon (02021R0821-20251115) in the classification register.